The role of oxygen vacancies on switching characteristics of TiOx resistive memories

Z. W. Zheng, H. H. Hsu, P. C. Chen, C. H. Cheng*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Using oxygen vacancy rich (VO-rich) TiOx dielectric with high work function Ni electrode, large resistance window of > 10x and narrow current distribution were realized in the Ni/VO-rich TiOx/TaN resistive random access memory (RRAM) device. It can be ascribed to the formation and rupture of conducting filaments by the percolation of VOs and Ti interstitials. Moreover, the effects of annealing treatment and top electrode on resistive switching properties were investigated. The device with VO-deficient TiOx after annealing reduces the defects and exhibits small window and low switching currents. The device with low work function Ti top electrode provides low barrier to increase reset currents and the randomly distributed filamentary paths forms near the Ti causes wide current distribution.

Original languageEnglish
Pages (from-to)4431-4434
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Issue number6
Publication statusPublished - 2015 Jun 1


  • Filament
  • Resistive Random Access Memory (RRAM)
  • TiO
  • Work function

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • Biomedical Engineering
  • General Materials Science
  • Condensed Matter Physics


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