@inproceedings{0cde987a3df143e9bbc81cf5ab99c160,
title = "The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components",
abstract = "This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.",
keywords = "Chemiresistor, MEMS, Micro-gas analyzer, Monolayer protected nano-Au cluster",
author = "Jian, \{Rih Sheng\} and Lu, \{Chia Jung\}",
year = "2010",
language = "English",
isbn = "9781618390622",
series = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010",
pages = "1022--1024",
booktitle = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010",
note = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 ; Conference date: 03-10-2010 Through 07-10-2010",
}