TY - GEN
T1 - The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components
AU - Jian, Rih Sheng
AU - Lu, Chia Jung
PY - 2010/12/1
Y1 - 2010/12/1
N2 - This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.
AB - This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.
KW - Chemiresistor
KW - MEMS
KW - Micro-gas analyzer
KW - Monolayer protected nano-Au cluster
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M3 - Conference contribution
AN - SCOPUS:84884367030
SN - 9781618390622
T3 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
SP - 1022
EP - 1024
BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
T2 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Y2 - 3 October 2010 through 7 October 2010
ER -