The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components

Rih Sheng Jian; Chia Jung Lu

The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components

Department of Chemistry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.

Original language	English
Title of host publication	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages	1022-1024
Number of pages	3
Publication status	Published - 2010 Dec 1
Event	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands Duration: 2010 Oct 3 → 2010 Oct 7

Publication series

Name	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Volume	2

Other

Other	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Country	Netherlands
City	Groningen
Period	10/10/3 → 10/10/7

Keywords

Chemiresistor
MEMS
Micro-gas analyzer
Monolayer protected nano-Au cluster

ASJC Scopus subject areas

Control and Systems Engineering

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Cite this

Jian, R. S., & Lu, C. J. (2010). The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (pp. 1022-1024). (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 2).

The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components. / Jian, Rih Sheng; Lu, Chia Jung.

14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 2010. p. 1022-1024 (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jian, RS & Lu, CJ 2010, The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components. in 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, vol. 2, pp. 1022-1024, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, Groningen, Netherlands, 10/10/3.

Jian, Rih Sheng ; Lu, Chia Jung. / The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components. 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 2010. pp. 1022-1024 (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010).

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abstract = "This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.",

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