Abstract
This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.
| Original language | English |
|---|---|
| Title of host publication | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
| Pages | 1022-1024 |
| Number of pages | 3 |
| Publication status | Published - 2010 Dec 1 |
| Event | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands Duration: 2010 Oct 3 → 2010 Oct 7 |
Publication series
| Name | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
|---|---|
| Volume | 2 |
Other
| Other | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
|---|---|
| Country | Netherlands |
| City | Groningen |
| Period | 10/10/3 → 10/10/7 |
Keywords
- Chemiresistor
- MEMS
- Micro-gas analyzer
- Monolayer protected nano-Au cluster
ASJC Scopus subject areas
- Control and Systems Engineering
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Cite this
Jian, R. S., & Lu, C. J. (2010). The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (pp. 1022-1024). (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 2).