The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components

Rih Sheng Jian, Chia Jung Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.

Original languageEnglish
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages1022-1024
Number of pages3
Publication statusPublished - 2010 Dec 1
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
Duration: 2010 Oct 32010 Oct 7

Publication series

Name14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Volume2

Other

Other14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
CountryNetherlands
CityGroningen
Period10/10/310/10/7

Keywords

  • Chemiresistor
  • MEMS
  • Micro-gas analyzer
  • Monolayer protected nano-Au cluster

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Jian, R. S., & Lu, C. J. (2010). The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (pp. 1022-1024). (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 2).