Abstract
This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.
| Original language | English |
|---|---|
| Title of host publication | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
| Pages | 1022-1024 |
| Number of pages | 3 |
| Publication status | Published - 2010 Dec 1 |
| Event | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands Duration: 2010 Oct 3 → 2010 Oct 7 |
Publication series
| Name | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
|---|---|
| Volume | 2 |
Other
| Other | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 |
|---|---|
| Country | Netherlands |
| City | Groningen |
| Period | 10/10/3 → 10/10/7 |
Fingerprint
Keywords
- Chemiresistor
- MEMS
- Micro-gas analyzer
- Monolayer protected nano-Au cluster
ASJC Scopus subject areas
- Control and Systems Engineering
Cite this
The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components. / Jian, Rih Sheng; Lu, Chia Jung.
14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 2010. p. 1022-1024 (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 2).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - The integration and evaluation of a prototype real-time micro gas analyzer employing mems based key components
AU - Jian, Rih Sheng
AU - Lu, Chia Jung
PY - 2010/12/1
Y1 - 2010/12/1
N2 - This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.
AB - This paper presents the integration and evaluations of a hybrid micro-gas analyzer system using MEMS technology on Si chips. Three key components embedded in this analyzer are: a 3-stage u-preconcentrator, a u-column chip coated with DB-1, and micro-chemiresistor array coated with monolayer protected nano-Au cluster. u-column was thermostatic by TE chip which can program the temperature from 5 to 80°C at 1°C/sec. Scrubbed air was used as the carrier gas for this system. System control and data acquisition software were written by Lab VIEW. Mixture of 7 VOCs were efficiently separated in less than 2 minutes, the array provided responses were rapid and reversible, detection limits were between 0.26 to 3.45 ng.
KW - Chemiresistor
KW - MEMS
KW - Micro-gas analyzer
KW - Monolayer protected nano-Au cluster
UR - http://www.scopus.com/inward/record.url?scp=84884367030&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84884367030&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84884367030
SN - 9781618390622
T3 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
SP - 1022
EP - 1024
BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
ER -