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The enhancement of MOSFET electric performance through strain engineering by refilled sige as Source and Drain

  • Hsin Chia Yang
  • , Chao Wang Li
  • , Wen Shiang Liao
  • , Chong Kuan Du
  • , Mu Chun Wang*
  • , Jie Min Yang
  • , Chun Wei Lian
  • , Chuan Hsi Liu
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering