The effect of N-channel polysilicon thin-film transistors with body-block spacers

Jyi Tsong Lin; Kuo Dong Huang; Shu-Fen Hu

doi:10.1016/j.sse.2007.02.043

The effect of N-channel polysilicon thin-film transistors with body-block spacers

Jyi Tsong Lin, Kuo Dong Huang, Shu-Fen Hu

Department of Physics

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

This study investigates structural modifications of the conventional TFT, which is suffers from the short-channel effect in advanced applications. An ideal body-block poly-Si thin-film transistor is successfully fabricated for the first time at a level that achieves high performance characteristics. The output characteristics of the body-block TFT, for instance, the low output conductance in the saturation area and high breakdown voltage, achieve an outstanding improvements compared to a conventional TFT. The poly-Si thin-film treatments of the body-block TFT with NH₃ diffusion or body implantation, and their corresponding performance effects, have also been investigated and discussed in depth.

Original language	English
Pages (from-to)	1056-1061
Number of pages	6
Journal	Solid-State Electronics
Volume	51
Issue number	7
DOIs	https://doi.org/10.1016/j.sse.2007.02.043
Publication status	Published - 2007 Jul

Keywords

Drain induced barrier lowing (DIBL)
Short-channel effect (SCE)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.sse.2007.02.043

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title = "The effect of N-channel polysilicon thin-film transistors with body-block spacers",

abstract = "This study investigates structural modifications of the conventional TFT, which is suffers from the short-channel effect in advanced applications. An ideal body-block poly-Si thin-film transistor is successfully fabricated for the first time at a level that achieves high performance characteristics. The output characteristics of the body-block TFT, for instance, the low output conductance in the saturation area and high breakdown voltage, achieve an outstanding improvements compared to a conventional TFT. The poly-Si thin-film treatments of the body-block TFT with NH3 diffusion or body implantation, and their corresponding performance effects, have also been investigated and discussed in depth.",

keywords = "Drain induced barrier lowing (DIBL), Short-channel effect (SCE)",

author = "Lin, {Jyi Tsong} and Huang, {Kuo Dong} and Shu-Fen Hu",

note = "Funding Information: The authors thank the National Nano Device Laboratories (NDL) (Contract No. NDL-95S-C-121) for financially supporting this research. Professor Y.C. Chou and P.J. Yen are also appreciated for their assistance on SEM image collection. Copyright: Copyright 2009 Elsevier B.V., All rights reserved.",

year = "2007",

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AU - Lin, Jyi Tsong

AU - Huang, Kuo Dong

AU - Hu, Shu-Fen

N1 - Funding Information: The authors thank the National Nano Device Laboratories (NDL) (Contract No. NDL-95S-C-121) for financially supporting this research. Professor Y.C. Chou and P.J. Yen are also appreciated for their assistance on SEM image collection. Copyright: Copyright 2009 Elsevier B.V., All rights reserved.

PY - 2007/7

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N2 - This study investigates structural modifications of the conventional TFT, which is suffers from the short-channel effect in advanced applications. An ideal body-block poly-Si thin-film transistor is successfully fabricated for the first time at a level that achieves high performance characteristics. The output characteristics of the body-block TFT, for instance, the low output conductance in the saturation area and high breakdown voltage, achieve an outstanding improvements compared to a conventional TFT. The poly-Si thin-film treatments of the body-block TFT with NH3 diffusion or body implantation, and their corresponding performance effects, have also been investigated and discussed in depth.

AB - This study investigates structural modifications of the conventional TFT, which is suffers from the short-channel effect in advanced applications. An ideal body-block poly-Si thin-film transistor is successfully fabricated for the first time at a level that achieves high performance characteristics. The output characteristics of the body-block TFT, for instance, the low output conductance in the saturation area and high breakdown voltage, achieve an outstanding improvements compared to a conventional TFT. The poly-Si thin-film treatments of the body-block TFT with NH3 diffusion or body implantation, and their corresponding performance effects, have also been investigated and discussed in depth.

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KW - Short-channel effect (SCE)

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