The demonstration of carbon nanotubes (CNTs) as flip-chip connections in 3-D integrated circuits with an ultralow connection resistance

M. H. Liao*, P. Y. Lu, W. J. Su, S. C. Chen, H. T. Hung, C. R. Kao, W. C. Pu, C. C.A. Chen, M. H. Lee

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

In this brief, the high-quality carbon nanotubes (CNTs) is grown by a chemical vapor deposition (CVD) method, and it is used as an ultrafine flip-chip interconnection material in the proposed 3-D integrated circuit (3DIC) system. We show a patterned growth of multiwalled CNTs on the substrate with prestructured bond pads including a complete metallization system for an electrical characterization. We succeeded in achieving reliable flip-chip connections between CNT-covered contact pads and metal pads during the room temperature bonding process. The goal is a reversible electrical and mechanical chip assembly with CNT bumps. Based on the current-voltage (I - V) measurements, the resistivity (ρ) of the grown CNTs is found to be close to ∼ 10-6 Ωm. With the proposed 3DIC process flow, the vertically electrical connection between two different Si substrates is demonstrated successfully. The connection resistance in the full 3-D system is very promising (∼ 2.43 Ω), compared with other's work (∼ 12 Ω). The different bonding materials (In versus Sn) and bonding times are also investigated systemically and further optimized. This brief provides a useful solution for the future electrical connection in the high-performance and high-dense 3-D integrated devices.

Original languageEnglish
Article number9042868
Pages (from-to)2205-2207
Number of pages3
JournalIEEE Transactions on Electron Devices
Volume67
Issue number5
DOIs
Publication statusPublished - 2020 May

Keywords

  • 3-D integrated circuits (3DICs)
  • carbon nanotubes (CNTs)
  • electrical resistance
  • flip-chip bonding connections

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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