Synchrotron radiation X-ray diffraction and X-ray photoelectron spectroscopy investigation on Si-based structures for sub-micron Si-IC applications
- Zhe Chuan Feng*
- , Li Chi Cheng
- , Chu Wan Huang
- , Ying Lang Wang
- , T. R. Yang
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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