@inproceedings{3ae989913f634633bb2226922c845fb0,
title = "Synchrotron radiation X-ray diffraction and X-ray photoelectron spectroscopy investigation on Si-based structures for sub-micron Si-IC applications",
abstract = "Synchrotron radiation X-ray diffraction and X-ray photoelectron spectroscopy techniques have been employed for the investigation on Si-based layer structures for sub-micron Si-IC Applications. The high energy synchrotron radiation light sources have produced plenty of X-ray lines with high index diffraction and strong X-ray photoelectron emissions. The useful information will increase our understanding of these materials which are applied extensively to the semiconductor industry.",
author = "Feng, {Zhe Chuan} and Cheng, {Li Chi} and Huang, {Chu Wan} and Wang, {Ying Lang} and Yang, {T. R.}",
year = "2006",
doi = "10.1109/SMELEC.2006.380785",
language = "English",
isbn = "0780397312",
series = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",
pages = "981--984",
booktitle = "ICSE 2006",
note = "2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 ; Conference date: 29-11-2006 Through 01-12-2006",
}