Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

Sy Hann Chen; Heh Nan Lin; Chii Ron Yang

doi:10.1063/1.1288234

Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

Sy Hann Chen, Heh Nan Lin^*, Chii Ron Yang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.

Original language	English
Pages (from-to)	3953-3954
Number of pages	2
Journal	Review of Scientific Instruments
Volume	71
Issue number	10
DOIs	https://doi.org/10.1063/1.1288234
Publication status	Published - 2000 Oct
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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10.1063/1.1288234

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title = "Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe",

abstract = "We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.",

author = "Chen, {Sy Hann} and Lin, {Heh Nan} and Yang, {Chii Ron}",

year = "2000",

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AB - We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.

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Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

Abstract

ASJC Scopus subject areas

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