Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe

Sy Hann Chen, Heh Nan Lin, Chii Ron Yang

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 μm and a height of 31.9 μm were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm.

Original languageEnglish
Pages (from-to)3953-3954
Number of pages2
JournalReview of Scientific Instruments
Volume71
Issue number10
DOIs
Publication statusPublished - 2000 Oct
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

Fingerprint Dive into the research topics of 'Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe'. Together they form a unique fingerprint.

  • Cite this