Surface forming on glass material by femtosecond laser modification with HF etching process

Hung Yin Tsai, Shao Wei Luo, Tien Li Chang

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A rapid surface-microstructuring by femtosecond laser modification without profile scanning is demonstrated on glass. The embedded grating and grid patterns are scribed inside the glass by the laser. After that, the glass is immersed in 10 wt% HF for developing. Additionally, the numerical calculation and simulation are utilized to compute the modification with etching. A fast approach to calculate the modified volume and shape by considering the fluence and material absorption is proposed. The obtained structure formed by anisotropic etching between modified and intrinsic material can be simulated for different etching selectivity. The simulated results agree well with the experimental ones.

Original languageEnglish
Pages (from-to)205-208
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume64
Issue number1
DOIs
Publication statusPublished - 2015 Jan 1

Fingerprint

Ultrashort pulses
Etching
Glass
Anisotropic etching
Scanning
Lasers

Keywords

  • Etching
  • Laser micro-machining
  • Simulation

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Surface forming on glass material by femtosecond laser modification with HF etching process. / Tsai, Hung Yin; Luo, Shao Wei; Chang, Tien Li.

In: CIRP Annals - Manufacturing Technology, Vol. 64, No. 1, 01.01.2015, p. 205-208.

Research output: Contribution to journalArticle

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