Study on wetting properties of periodical nanopatterns by a combinative technique of photolithography and laser interference lithography

Yung Lang Yang, Chin Chi Hsu, Tien Li Chang, Long Sheng Kuo, Ping Hei Chen

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

This study presents the wetting properties, including hydrophilicity, hydrophobicity and anisotropic behavior, of water droplets on the silicon wafer surface with periodical nanopatterns and hierarchical structures. This study fabricates one- and two-dimensional periodical nanopatterns using laser interference lithography (LIL). The fabrication of hierarchical structures was effectively achieved by combining photolithography and LIL techniques. Unlike conventional fabrication methods, the LIL technique is mainly used to control the large-area design of periodical nanopatterns in this study. The minimum feature size for each nanopattern is 100 nm. This study shows that the wetting behavior of one-dimensional, two-dimensional, and hierarchical patterns can be obtained, benefiting the development of surface engineering for microfluidic systems.

Original languageEnglish
Pages (from-to)3683-3687
Number of pages5
JournalApplied Surface Science
Volume256
Issue number11
DOIs
Publication statusPublished - 2010 Mar 15

Fingerprint

Photolithography
Lithography
Wetting
Lasers
Fabrication
Hydrophilicity
Hydrophobicity
Silicon wafers
Microfluidics
Water

Keywords

  • Hierarchical structures
  • Hydrophilic
  • Hydrophobic
  • Laser interference lithography
  • Periodical nanostructures

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Study on wetting properties of periodical nanopatterns by a combinative technique of photolithography and laser interference lithography. / Yang, Yung Lang; Hsu, Chin Chi; Chang, Tien Li; Kuo, Long Sheng; Chen, Ping Hei.

In: Applied Surface Science, Vol. 256, No. 11, 15.03.2010, p. 3683-3687.

Research output: Contribution to journalArticle

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