Study on anisotropic silicon etching characteristics in various surfactant-added tetramethyl ammonium hydroxide water solutions

Chii Rong Yang*, Cheng Hao Yang, Po Ying Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

60 Citations (Scopus)

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Chemical Engineering

Material Science

Pharmacology, Toxicology and Pharmaceutical Science

Engineering

Biochemistry, Genetics and Molecular Biology