Study of PMMA on microstructuring as a KrF excimer laser LIGA material

Chii-Rong Yang*, Bruce C.S. Chou, H. Y. Chou, Frank H.H. Lin, W. K. Kuo, Roger K.S. Luo, J. W. Chang, Z. J. Wei

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

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