Study of PMMA on microstructuring as a KrF excimer laser LIGA material

Chii-Rong Yang, Bruce C.S. Chou, H. Y. Chou, Frank H.H. Lin, W. K. Kuo, Roger K.S. Luo, J. W. Chang, Z. J. Wei

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

PMMA (polymethyl methacrylate) has been widely used as x-ray LIGA material for its good features of electrical acid plating of all common metals to industrial applications. Unlike the tough characteristics of polyimide in almost all alkaline and acid solutions, PMMA is easily removed in chemical etchants after electroplating process. For this reason, ablation-etching characteristics of PMMA material for 3D microstructures fabrication using a 248nm KrF excimer laser were investigated. Moreover, the uses of the laminated dry film were also studied in this work. Experimental results show that PMMA microstructress can produce the near-vertical side-wall profile as the laser fluence up to 2.5 J/cm2. PMMA templates with high aspect ratio of around 25 were demonstrated, and the sequential electroplating processes have realized the metallic microstructures. Moreover, the microstructures fabricated in dry film show the perfect side-wall quality, and no residues of debris were found.

Original languageEnglish
Pages (from-to)342-348
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3511
DOIs
Publication statusPublished - 1998 Dec 1
EventMicromachining and Microfabrication Process Technology IV - Santa Clara, CA, United States
Duration: 1998 Sep 211998 Sep 22

Fingerprint

Excimer Laser
laser materials
Excimer lasers
Polymethyl Methacrylate
Polymethyl methacrylates
polymethyl methacrylate
excimer lasers
Microstructure
electroplating
Polyimide
Electroplating
Ablation
microstructure
Etching
Industrial Application
Aspect Ratio
Template
Fabrication
Metals
Vertical

Keywords

  • Ablation
  • Debris
  • KrF excimer laser
  • LIGA
  • Laminated dry film
  • PMMA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Study of PMMA on microstructuring as a KrF excimer laser LIGA material. / Yang, Chii-Rong; Chou, Bruce C.S.; Chou, H. Y.; Lin, Frank H.H.; Kuo, W. K.; Luo, Roger K.S.; Chang, J. W.; Wei, Z. J.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3511, 01.12.1998, p. 342-348.

Research output: Contribution to journalConference article

Yang, Chii-Rong ; Chou, Bruce C.S. ; Chou, H. Y. ; Lin, Frank H.H. ; Kuo, W. K. ; Luo, Roger K.S. ; Chang, J. W. ; Wei, Z. J. / Study of PMMA on microstructuring as a KrF excimer laser LIGA material. In: Proceedings of SPIE - The International Society for Optical Engineering. 1998 ; Vol. 3511. pp. 342-348.
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