Structure design of IGZO TFTs with stress analysis for flexible applications using finite element method

M. H. Lee, S. M. Hsu, C. Liu, J. D. Shen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The stress analysis in flexible IGZO TFTs structures with ITO electrode and rolling curvatures using finite element method was proposed. The stress at mid-channel with four structures was compared and obtained the top-gate structure with small stress variation for mechanical rolling. The feasibility of oxide TFT was optimized the structures.

Original languageEnglish
Title of host publication21st International Display Workshops 2014, IDW 2014
PublisherSociety for Information Display
Pages1479-1482
Number of pages4
ISBN (Electronic)9781510827790
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event21st International Display Workshops 2014, IDW 2014 - Niigata, Japan
Duration: 2014 Dec 32014 Dec 5

Publication series

Name21st International Display Workshops 2014, IDW 2014
Volume2

Conference

Conference21st International Display Workshops 2014, IDW 2014
CountryJapan
CityNiigata
Period14/12/314/12/5

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Keywords

  • Finite Element
  • Flexible
  • IGZO
  • Stress

ASJC Scopus subject areas

  • Hardware and Architecture
  • Human-Computer Interaction
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Lee, M. H., Hsu, S. M., Liu, C., & Shen, J. D. (2014). Structure design of IGZO TFTs with stress analysis for flexible applications using finite element method. In 21st International Display Workshops 2014, IDW 2014 (pp. 1479-1482). (21st International Display Workshops 2014, IDW 2014; Vol. 2). Society for Information Display.