Structural properties of ultra-thin Y₂O₃ gate dielectrics studied by X-Ray Diffraction (XRD) and X-Ray Photoelectron Spectroscopy (XPS)

Chuan Hsi Liu, Pi Chun Juan, Chin Pao Cheng, Guan Ting Lai, Huan Lee, Yi Kuan Chen, Yu Wei Liu, Chih Wei Hsu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

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