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Structural optimizations of silicon based NMOSFETs with a sunken STI pattern by using a robust stress simulation methodology

  • Chang Chun Lee*
  • , Chuan Hsi Liu
  • , Hsien Chie Cheng
  • , Rong Hao Deng
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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