Strained Si1-xCx field effect transistor on SiGe substrate

S. T. Chang, Min-Hung Lee, S. C. Lu, C. W. Liu

    Research output: Contribution to conferencePaperpeer-review


    We propose for the first time the tensile-strained Si1-xC x channel on SiGe substrate CMOS devices. Theoretical calculations show enhancement of both electron and hole mobilities in strained Si 1-xCx on SiGe substrates as compared to Si. Furthermore, the added carbon can reduce outdiffusion of boron and phosphorous, so that the source/drain junction and channel has an abrupt doping distribution, preventing short-channel effect and minimizing device dimensions. With the benefit of strain in Si1-xCx alloy being more significant than in silicon, the MOSFET structure according to the idea uses Si1-xC x instead, providing better symmetry of the designed current driving force and speed, minimizing the device scale and enhancing the current driving force.

    Original languageEnglish
    Number of pages11
    Publication statusPublished - 2004 Dec 1
    EventSiGe: Materials, Processing, and Devices - Proceedings of the First Symposium - Honolulu, HI, United States
    Duration: 2004 Oct 32004 Oct 8


    OtherSiGe: Materials, Processing, and Devices - Proceedings of the First Symposium
    Country/TerritoryUnited States
    CityHonolulu, HI

    ASJC Scopus subject areas

    • Engineering(all)


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