Sputter-cleaning of an aluminum alloy using a thermionically assisted triode plasma system

J. H. Hsieh*, C. Li, S. J. Liu

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Sputter-cleaning of an aluminum alloy using a thermionically assisted triode plasma system'. Together they form a unique fingerprint.

INIS

Physics

Material Science

Engineering

Earth and Planetary Sciences