SIMS and MOKE studies of Fe/Gd multilayers on Si

Li Shing Hsu*, C. K. Lo, Y. D. Yao, C. S. Yang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


Two Fe/Gd/Fe/Gd multilayers with different layer thicknesses were grown on Si (100) by magnetron sputtering. The as-deposited samples were vacuum-annealed at 100 °C, 200 °C, and 300 °C. They were studied by grazing incidence x-ray diffraction (XRD), secondary ion mass spectroscopy (SIMS), vibrating sample magnetometer (VSM) and magneto-optical Kerr effect (MOKE). The deposition rates for Fe and for Gd are (1-2) and 4 angstroms s-1, respectively. The XRD and SIMS data show that interdiffusion occurs between Fe and Gd layers, and between Gd and Si layers. The thicker multilayers show strong in-plane uniaxial anisotropy.

Original languageEnglish
Pages (from-to)65-70
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: 1996 Apr 81996 Apr 12

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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