Silicon vertical microstructure fabrication by catalytic etching

Mao Jung Huang, Chii Rong Yang, Chun Ming Chang, Nien Nan Chu, Ming Hua Shiao

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

This study presents an effective, simple and inexpensive process for forming micro-scale vertical structures on a (100) silicon wafer. Several modified etchants and micro-patterns including rectangular, snake-like, circular and comb patterns were employed to determine the optimum etching process. We found that an etchant solution consisting of 4.6M hydrofluoric acid, 0.44M hydrogen peroxide and isopropyl alcohol produces microstructures at an etching rate of 0.47m min 1and surface roughness of 17.4nm. All the patterns were transferred faithfully to the silicon substrate.

Original languageEnglish
Article number085002
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number8
DOIs
Publication statusPublished - 2012 Aug 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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