Silicon nano-column fabricated by catalytic etching for electrode of fuel cell

Mao Jung Huang, Chun Ting Lin, Chun Ming Chang, Nien Nan Chu, Ming Hua Shiao, Chii Rong Yang, Yuang Cherng Chiou, Rong Tsong Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With advances in fabrication technologies, a number of methods can be used to create micro/nanostructures. Herein, a simple and efficient silicon nano-column array is made through self-assembled nano-sphere lithography (SANL) and catalytic etching. Moreover, we demonstrate the ability to apply this high aspect ratio structure into fuel cell electrodes. The experimental results indicate that SANL can effectively define a nano-patterned array. The highest height of nano-column is about 10m which were formed by catalytic etching with 25 min. Furthermore, nano-column arrays with catalytic etching of and 15 min were used to produce a fuel cell electrode. Its oxidation current of 6.04 mA is 8.1 times higher than that obtained by a planar electrode.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages305-308
Number of pages4
DOIs
Publication statusPublished - 2011 Oct 4
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 2011 Feb 202011 Feb 23

Other

Other6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
CountryTaiwan
CityKaohsiung
Period11/2/2011/2/23

Keywords

  • catalytic etching
  • fuel cell
  • nano column

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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    Huang, M. J., Lin, C. T., Chang, C. M., Chu, N. N., Shiao, M. H., Yang, C. R., Chiou, Y. C., & Lee, R. T. (2011). Silicon nano-column fabricated by catalytic etching for electrode of fuel cell. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 305-308). [6017354] https://doi.org/10.1109/NEMS.2011.6017354