Silicon nano-column fabricated by catalytic etching for electrode of fuel cell

Mao Jung Huang; Chun Ting Lin; Chun Ming Chang; Nien Nan Chu; Ming Hua Shiao; Chii Rong Yang; Yuang Cherng Chiou; Rong Tsong Lee

doi:10.1109/NEMS.2011.6017354

Silicon nano-column fabricated by catalytic etching for electrode of fuel cell

Mao Jung Huang, Chun Ting Lin, Chun Ming Chang, Nien Nan Chu, Ming Hua Shiao, Chii Rong Yang, Yuang Cherng Chiou, Rong Tsong Lee

Department of Mechartronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

With advances in fabrication technologies, a number of methods can be used to create micro/nanostructures. Herein, a simple and efficient silicon nano-column array is made through self-assembled nano-sphere lithography (SANL) and catalytic etching. Moreover, we demonstrate the ability to apply this high aspect ratio structure into fuel cell electrodes. The experimental results indicate that SANL can effectively define a nano-patterned array. The highest height of nano-column is about 10m which were formed by catalytic etching with 25 min. Furthermore, nano-column arrays with catalytic etching of and 15 min were used to produce a fuel cell electrode. Its oxidation current of 6.04 mA is 8.1 times higher than that obtained by a planar electrode.

Original language	English
Title of host publication	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages	305-308
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2011.6017354
Publication status	Published - 2011 Oct 4
Event	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan Duration: 2011 Feb 20 → 2011 Feb 23

Other

Other	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country	Taiwan
City	Kaohsiung
Period	2011/02/20 → 2011/02/23

Keywords

catalytic etching
fuel cell
nano column

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Access to Document

10.1109/NEMS.2011.6017354

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Silicon nano-column fabricated by catalytic etching for electrode of fuel cell. / Huang, Mao Jung; Lin, Chun Ting; Chang, Chun Ming; Chu, Nien Nan; Shiao, Ming Hua; Yang, Chii Rong; Chiou, Yuang Cherng; Lee, Rong Tsong.

NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. p. 305-308 6017354.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Huang, MJ, Lin, CT, Chang, CM, Chu, NN, Shiao, MH, Yang, CR, Chiou, YC & Lee, RT 2011, Silicon nano-column fabricated by catalytic etching for electrode of fuel cell. in NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 6017354, pp. 305-308, 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, 2011/02/20. https://doi.org/10.1109/NEMS.2011.6017354

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abstract = "With advances in fabrication technologies, a number of methods can be used to create micro/nanostructures. Herein, a simple and efficient silicon nano-column array is made through self-assembled nano-sphere lithography (SANL) and catalytic etching. Moreover, we demonstrate the ability to apply this high aspect ratio structure into fuel cell electrodes. The experimental results indicate that SANL can effectively define a nano-patterned array. The highest height of nano-column is about 10m which were formed by catalytic etching with 25 min. Furthermore, nano-column arrays with catalytic etching of and 15 min were used to produce a fuel cell electrode. Its oxidation current of 6.04 mA is 8.1 times higher than that obtained by a planar electrode.",

keywords = "catalytic etching, fuel cell, nano column",

author = "Huang, {Mao Jung} and Lin, {Chun Ting} and Chang, {Chun Ming} and Chu, {Nien Nan} and Shiao, {Ming Hua} and Yang, {Chii Rong} and Chiou, {Yuang Cherng} and Lee, {Rong Tsong}",

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AU - Huang, Mao Jung

AU - Lin, Chun Ting

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AU - Chu, Nien Nan

AU - Shiao, Ming Hua

AU - Yang, Chii Rong

AU - Chiou, Yuang Cherng

AU - Lee, Rong Tsong

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