Abstract
With advances in fabrication technologies, a number of methods can be used to create micro/nanostructures. Herein, a simple and efficient silicon nano-column array is made through self-assembled nano-sphere lithography (SANL) and catalytic etching. Moreover, we demonstrate the ability to apply this high aspect ratio structure into fuel cell electrodes. The experimental results indicate that SANL can effectively define a nano-patterned array. The highest height of nano-column is about 10m which were formed by catalytic etching with 25 min. Furthermore, nano-column arrays with catalytic etching of and 15 min were used to produce a fuel cell electrode. Its oxidation current of 6.04 mA is 8.1 times higher than that obtained by a planar electrode.
Original language | English |
---|---|
Title of host publication | NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems |
Pages | 305-308 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2011 Oct 4 |
Event | 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan Duration: 2011 Feb 20 → 2011 Feb 23 |
Other
Other | 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 |
---|---|
Country | Taiwan |
City | Kaohsiung |
Period | 2011/02/20 → 2011/02/23 |
Keywords
- catalytic etching
- fuel cell
- nano column
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics