Sapphire surface patterning using femtosecond laser micromachining

Cho Wei Chang, Chien Yu Chen, Tien-Li Chang, Chia Jen Ting, Chien Ping Wang, Chang Pin Chou

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

This study presents an alternative method for micron-resolution patterning of a sapphire surface utilizing the characteristic of an ultra-short pulse (10-15 s) from ytterbium (Yb) femtosecond laser (FS-laser) irradiation. Conventional processes often involve several steps, such as wet chemical or dry etching, for surface structuring of sapphire. In this study, two-dimensional array patterns on the sapphire surface with an area of 5 × 5 mm2 and a depth of 1.2 ± 0.1 μm can be directly and easily fabricated by a single step of the FS-laser process, which involves 350-fs laser pulses with a wavelength of 517 nm at a repetition rate of 100 kHz. The measured ablation depths on the sapphire surface display that the proposed process can be under wellcontrolled conditions. Based on the design changes for being quickly implemented in the micromachining process, a FS laser can be a promising and competitive tool for patterning sapphire with an acceptable quality for industrial usage.

Original languageEnglish
Pages (from-to)441-448
Number of pages8
JournalApplied Physics A: Materials Science and Processing
Volume109
Issue number2
DOIs
Publication statusPublished - 2012 Nov 1

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Aluminum Oxide
Micromachining
Ultrashort pulses
Sapphire
Ytterbium
Dry etching
Wet etching
Laser beam effects
Ablation
Laser pulses
Wavelength
Lasers

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

Cite this

Sapphire surface patterning using femtosecond laser micromachining. / Chang, Cho Wei; Chen, Chien Yu; Chang, Tien-Li; Ting, Chia Jen; Wang, Chien Ping; Chou, Chang Pin.

In: Applied Physics A: Materials Science and Processing, Vol. 109, No. 2, 01.11.2012, p. 441-448.

Research output: Contribution to journalArticle

Chang, Cho Wei ; Chen, Chien Yu ; Chang, Tien-Li ; Ting, Chia Jen ; Wang, Chien Ping ; Chou, Chang Pin. / Sapphire surface patterning using femtosecond laser micromachining. In: Applied Physics A: Materials Science and Processing. 2012 ; Vol. 109, No. 2. pp. 441-448.
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