Fingerprint Dive into the research topics of 'Rapid post-metallization annealing effects on high-k Y<sub>2</sub>O<sub>3</sub>/Si capacitor'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Rapid post-metallization annealing effects on high-k Y2O3/Si capacitor
T. S. Lay, Y. Y. Liao, W. D. Liu, Y. H. Lai, W. H. Hung, J. Kwo, M. Hong, J. P. Mannaerts
Research output: Contribution to journal › Article › peer-review
8
Citations
(Scopus)