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Dive into the research topics of 'Rapid post-metallization annealing effects on high-k Y<sub>2</sub>O<sub>3</sub>/Si capacitor'. Together they form a unique fingerprint.
Chemical Compounds
Metallizing
Annealing
Capacitors
Depth profiling
Photoelectrons
MOS capacitors
Interface states
Rapid thermal annealing
Silicates
Charge density
Oxides
X rays
Capacitance
Stabilization
Electric potential
Hot Temperature
Engineering & Materials Science
Metallizing
Annealing
Capacitors
Depth profiling
Photoelectrons
MOS capacitors
Interface states
Rapid thermal annealing
Charge density
Silicates
X rays
Oxides
Capacitance
Stabilization
Electric potential
Hot Temperature
Physics & Astronomy
capacitors
annealing
silicates
photoelectrons
stabilization
capacitance
oxides
electric potential
x rays