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Rapid post-metallization annealing effects on high-k Y2O3/Si capacitor
T. S. Lay*, Y. Y. Liao, W. D. Liu, Y. H. Lai, W. H. Hung, J. Kwo, M. Hong, J. P. Mannaerts
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
9
Citations
(Scopus)