Quantitative phase imaging with swept-source optical coherence tomography for optical measurement of nanostructures

Meng Tsan Tsai, Ya Ju Lee, Yung Chi Yao, Che Yen Kung, Feng Yu Chang, Jiann Der Lee

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

In this letter, a phase-sensitive, swept-source optical coherence tomography (SS-OCT) system is implemented for the optical measurement of nanostructures. A new approach is proposed to reduce the phase errors, resulting from trigger jitter of the swept source and the asynchronization between the A-scan trigger and OCT signal at the data acquisition end, with a narrowband fiber Bragg grating to generate the accurate A-scan trigger. Furthermore, combining the common-path configuration with the proposed approach, the displacement sensitivity can be calculated to be 80 pm when the swept source is operated at 30 kHz. Finally, the conducting glass was scanned with the proposed approach to quantitatively measure the thickness of conducting layer. The results show that the proposed SS-OCT approach can make be a potentially useful tool for noninvasive, real-time inspection of nanostructures.

Original languageEnglish
Article number6140545
Pages (from-to)640-642
Number of pages3
JournalIEEE Photonics Technology Letters
Volume24
Issue number8
DOIs
Publication statusPublished - 2012 Apr 4

Keywords

  • Conducting glass
  • optical coherence tomography
  • optical imaging
  • phase imaging

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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