Quantitative phase imaging with swept-source optical coherence tomography for optical measurement of nanostructures

Meng Tsan Tsai, Ya-Ju Lee, Yung Chi Yao, Che Yen Kung, Feng Yu Chang, Jiann Der Lee

    Research output: Contribution to journalArticle

    4 Citations (Scopus)

    Abstract

    In this letter, a phase-sensitive, swept-source optical coherence tomography (SS-OCT) system is implemented for the optical measurement of nanostructures. A new approach is proposed to reduce the phase errors, resulting from trigger jitter of the swept source and the asynchronization between the A-scan trigger and OCT signal at the data acquisition end, with a narrowband fiber Bragg grating to generate the accurate A-scan trigger. Furthermore, combining the common-path configuration with the proposed approach, the displacement sensitivity can be calculated to be 80 pm when the swept source is operated at 30 kHz. Finally, the conducting glass was scanned with the proposed approach to quantitatively measure the thickness of conducting layer. The results show that the proposed SS-OCT approach can make be a potentially useful tool for noninvasive, real-time inspection of nanostructures.

    Original languageEnglish
    Article number6140545
    Pages (from-to)640-642
    Number of pages3
    JournalIEEE Photonics Technology Letters
    Volume24
    Issue number8
    DOIs
    Publication statusPublished - 2012 Apr 4

    Fingerprint

    Optical tomography
    optical measurement
    Nanostructures
    tomography
    Imaging techniques
    actuators
    Fiber Bragg gratings
    Jitter
    Data acquisition
    Inspection
    conduction
    Glass
    phase error
    Bragg gratings
    data acquisition
    narrowband
    inspection
    vibration
    fibers
    glass

    Keywords

    • Conducting glass
    • optical coherence tomography
    • optical imaging
    • phase imaging

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Electrical and Electronic Engineering

    Cite this

    Quantitative phase imaging with swept-source optical coherence tomography for optical measurement of nanostructures. / Tsai, Meng Tsan; Lee, Ya-Ju; Yao, Yung Chi; Kung, Che Yen; Chang, Feng Yu; Lee, Jiann Der.

    In: IEEE Photonics Technology Letters, Vol. 24, No. 8, 6140545, 04.04.2012, p. 640-642.

    Research output: Contribution to journalArticle

    Tsai, Meng Tsan ; Lee, Ya-Ju ; Yao, Yung Chi ; Kung, Che Yen ; Chang, Feng Yu ; Lee, Jiann Der. / Quantitative phase imaging with swept-source optical coherence tomography for optical measurement of nanostructures. In: IEEE Photonics Technology Letters. 2012 ; Vol. 24, No. 8. pp. 640-642.
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