Proton implantation for electrical insulation of the InGaAs/InAlAs superlattice material used in 8-15 μm-emitting quantum cascade lasers
- J. D. Kirch
- , H. Kim
- , C. Boyle
- , C. C. Chang
- , L. J. Mawst
- , D. Lindberg
- , T. Earles
- , D. Botez*
- , M. Helm
- , J. Von Borany
- , S. Akhmadaliev
- , R. Böttger
- , C. Reyner
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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