@inproceedings{74fbafd30dd84f4184f188ddf6639d93,
title = "Promising a-Si:H TFTs with high mechanical reliability for flexible display",
abstract = "The high mechanical reliability of a-Si:H TFTs have been fabricated on plastic substrate for flexible display applications. The promising TFT backplane has been successfully applied for AMLCD on colorless polyimide (PI) substrate. The tri-layer of Ti/Al/Ti with 10 μm width are used as scan lines and data lines to replace Cr for stress compensation, and can sustain mechanical bending cycles. The TFTs at 200°C on PI substrate have superior stability with external strain and bending cycles. The redistribution of trap states is analyzed by modeling simulation. The promising a-Si:H TFTs on PI substrate after bending cycles still have superior operation and electrical stress stability and make it possible for AMOLED applications. The Si-based TFTs with high mechanical reliability are highly potential candidate for flexible active-matrix display beyond FPD (flat panel display) generation.",
author = "Lee, \{M. H.\} and Ho, \{K. Y.\} and Chen, \{P. C.\} and Cheng, \{C. C.\} and Chang, \{S. T.\} and M. Tang and Liao, \{M. H.\} and Yeh, \{Y. H.\}",
year = "2006",
doi = "10.1109/IEDM.2006.346767",
language = "English",
isbn = "1424404398",
series = "Technical Digest - International Electron Devices Meeting, IEDM",
booktitle = "2006 International Electron Devices Meeting Technical Digest, IEDM",
note = "2006 International Electron Devices Meeting, IEDM ; Conference date: 10-12-2006 Through 13-12-2006",
}