Promising a-Si:H TFTs with high mechanical reliability for flexible display

Min-Hung Lee, K. Y. Ho, P. C. Chen, C. C. Cheng, S. T. Chang, M. Tang, M. H. Liao, Y. H. Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

The high mechanical reliability of a-Si:H TFTs have been fabricated on plastic substrate for flexible display applications. The promising TFT backplane has been successfully applied for AMLCD on colorless polyimide (PI) substrate. The tri-layer of Ti/Al/Ti with 10 μm width are used as scan lines and data lines to replace Cr for stress compensation, and can sustain mechanical bending cycles. The TFTs at 200°C on PI substrate have superior stability with external strain and bending cycles. The redistribution of trap states is analyzed by modeling simulation. The promising a-Si:H TFTs on PI substrate after bending cycles still have superior operation and electrical stress stability and make it possible for AMOLED applications. The Si-based TFTs with high mechanical reliability are highly potential candidate for flexible active-matrix display beyond FPD (flat panel display) generation.

Original languageEnglish
Title of host publication2006 International Electron Devices Meeting Technical Digest, IEDM
DOIs
Publication statusPublished - 2006 Dec 1
Event2006 International Electron Devices Meeting, IEDM - San Francisco, CA, United States
Duration: 2006 Dec 102006 Dec 13

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Other

Other2006 International Electron Devices Meeting, IEDM
CountryUnited States
CitySan Francisco, CA
Period06/12/1006/12/13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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  • Cite this

    Lee, M-H., Ho, K. Y., Chen, P. C., Cheng, C. C., Chang, S. T., Tang, M., Liao, M. H., & Yeh, Y. H. (2006). Promising a-Si:H TFTs with high mechanical reliability for flexible display. In 2006 International Electron Devices Meeting Technical Digest, IEDM [4154186] (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2006.346767