Promising a-Si:H TFTs with high mechanical reliability for flexible display

Min-Hung Lee, K. Y. Ho, P. C. Chen, C. C. Cheng, S. T. Chang, M. Tang, M. H. Liao, Y. H. Yeh

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    11 Citations (Scopus)


    The high mechanical reliability of a-Si:H TFTs have been fabricated on plastic substrate for flexible display applications. The promising TFT backplane has been successfully applied for AMLCD on colorless polyimide (PI) substrate. The tri-layer of Ti/Al/Ti with 10 μm width are used as scan lines and data lines to replace Cr for stress compensation, and can sustain mechanical bending cycles. The TFTs at 200°C on PI substrate have superior stability with external strain and bending cycles. The redistribution of trap states is analyzed by modeling simulation. The promising a-Si:H TFTs on PI substrate after bending cycles still have superior operation and electrical stress stability and make it possible for AMOLED applications. The Si-based TFTs with high mechanical reliability are highly potential candidate for flexible active-matrix display beyond FPD (flat panel display) generation.

    Original languageEnglish
    Title of host publication2006 International Electron Devices Meeting Technical Digest, IEDM
    Publication statusPublished - 2006 Dec 1
    Event2006 International Electron Devices Meeting, IEDM - San Francisco, CA, United States
    Duration: 2006 Dec 102006 Dec 13

    Publication series

    NameTechnical Digest - International Electron Devices Meeting, IEDM
    ISSN (Print)0163-1918


    Other2006 International Electron Devices Meeting, IEDM
    Country/TerritoryUnited States
    CitySan Francisco, CA

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering
    • Materials Chemistry


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