Abstract
The depth profile of high resolution photoelectron spectra at Ga2O3(Gd2O3)/GaAs and Ga2O3/GaAs interfaces have been obtained by using synchrotron radiation beam and low energy Ar+ sputtering. Only one intermediary Ga oxidation state at binding energy ∼20.3 eV has been observed in the Ga2O3(Gd2O3)/GaAs sample. The data suggest that the presence of Gd stabilizes the Ga3+ oxidation state and leads to the excellent electrical insulating property of the Ga2O3(Gd2O3) film.
| Original language | English |
|---|---|
| Pages (from-to) | 423-426 |
| Number of pages | 4 |
| Journal | Solid-State Electronics |
| Volume | 45 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2001 Mar |
| Externally published | Yes |
Keywords
- Depth profile
- GaAs passivation
- GaO(GdO)
- Photoelectron spectroscopy
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry
- Electrical and Electronic Engineering