Preparation of organic soluble polyimides and their applications in KrF excimer laser LIGA process

Yu Sheng Hsieh, Chii-Rong Yang, Guang Yeu Hwang, Yu Der Lee

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this study two organic soluble polyimides were successfully synthesized via polycondensation of a hexafluoropropyl group contained dianhydride with two kinds of diamines. These two polyimides (DMDB/6FDA, OT/6FDA) can be dissolved in most aprotic solvents (for example, NMP, DMAc) and many other common solvents (for example. THF, DMSO). The soluble polyimides also show good thermal stability and high absorption at the KrF excimer laser wavelength (λ = 248 nm). (The absorption coefficients of DMDB/6FDA and OT/6FDA were 1.26 × 105 cm-1 and 1.49 × 10-1, respectively.) The photoablation properties of the polyimides were studied in detail. Due to incorporating the hexafluoropropyl group into the chemical structure, these two polyimides have higher etching rates than Kapton (a conmercial PI film). The effects of exposure parameters on linewidth and taper-angle of polyimides with different chemical structure were also investigated here. Under the proper control of exposure conditions, good precision patterns with near-vertical side wall can be produced. The 300 mm thick comb-shape and Fresnel patterns with 10 mm linewidth have been made. Moreover. the complementary metallic microstructures have also been realized in the following electroforming procedure. The results showed that these two soluble polyimides were very suitable for KrF Laser LIGA process.

Original languageEnglish
Pages (from-to)2394-2401
Number of pages8
JournalMacromolecular Chemistry and Physics
Volume202
Issue number11
DOIs
Publication statusPublished - 2001 Aug 4

Fingerprint

Excimer lasers
polyimides
Polyimides
excimer lasers
preparation
Linewidth
Electroforming
electroforming
Kapton (trademark)
Diamines
Polycondensation
diamines
tapering
Dimethyl Sulfoxide
Etching
absorptivity
Thermodynamic stability
thermal stability
etching
Wavelength

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Physical and Theoretical Chemistry
  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

Cite this

Preparation of organic soluble polyimides and their applications in KrF excimer laser LIGA process. / Hsieh, Yu Sheng; Yang, Chii-Rong; Hwang, Guang Yeu; Lee, Yu Der.

In: Macromolecular Chemistry and Physics, Vol. 202, No. 11, 04.08.2001, p. 2394-2401.

Research output: Contribution to journalArticle

@article{823ec749ea9d44afb4654b8e527559e3,
title = "Preparation of organic soluble polyimides and their applications in KrF excimer laser LIGA process",
abstract = "In this study two organic soluble polyimides were successfully synthesized via polycondensation of a hexafluoropropyl group contained dianhydride with two kinds of diamines. These two polyimides (DMDB/6FDA, OT/6FDA) can be dissolved in most aprotic solvents (for example, NMP, DMAc) and many other common solvents (for example. THF, DMSO). The soluble polyimides also show good thermal stability and high absorption at the KrF excimer laser wavelength (λ = 248 nm). (The absorption coefficients of DMDB/6FDA and OT/6FDA were 1.26 × 105 cm-1 and 1.49 × 10-1, respectively.) The photoablation properties of the polyimides were studied in detail. Due to incorporating the hexafluoropropyl group into the chemical structure, these two polyimides have higher etching rates than Kapton (a conmercial PI film). The effects of exposure parameters on linewidth and taper-angle of polyimides with different chemical structure were also investigated here. Under the proper control of exposure conditions, good precision patterns with near-vertical side wall can be produced. The 300 mm thick comb-shape and Fresnel patterns with 10 mm linewidth have been made. Moreover. the complementary metallic microstructures have also been realized in the following electroforming procedure. The results showed that these two soluble polyimides were very suitable for KrF Laser LIGA process.",
author = "Hsieh, {Yu Sheng} and Chii-Rong Yang and Hwang, {Guang Yeu} and Lee, {Yu Der}",
year = "2001",
month = "8",
day = "4",
doi = "10.1002/1521-3935(20010701)202:11<2394::AID-MACP2394>3.0.CO;2-K",
language = "English",
volume = "202",
pages = "2394--2401",
journal = "Macromolecular Chemistry and Physics",
issn = "1022-1352",
publisher = "Wiley-VCH Verlag",
number = "11",

}

TY - JOUR

T1 - Preparation of organic soluble polyimides and their applications in KrF excimer laser LIGA process

AU - Hsieh, Yu Sheng

AU - Yang, Chii-Rong

AU - Hwang, Guang Yeu

AU - Lee, Yu Der

PY - 2001/8/4

Y1 - 2001/8/4

N2 - In this study two organic soluble polyimides were successfully synthesized via polycondensation of a hexafluoropropyl group contained dianhydride with two kinds of diamines. These two polyimides (DMDB/6FDA, OT/6FDA) can be dissolved in most aprotic solvents (for example, NMP, DMAc) and many other common solvents (for example. THF, DMSO). The soluble polyimides also show good thermal stability and high absorption at the KrF excimer laser wavelength (λ = 248 nm). (The absorption coefficients of DMDB/6FDA and OT/6FDA were 1.26 × 105 cm-1 and 1.49 × 10-1, respectively.) The photoablation properties of the polyimides were studied in detail. Due to incorporating the hexafluoropropyl group into the chemical structure, these two polyimides have higher etching rates than Kapton (a conmercial PI film). The effects of exposure parameters on linewidth and taper-angle of polyimides with different chemical structure were also investigated here. Under the proper control of exposure conditions, good precision patterns with near-vertical side wall can be produced. The 300 mm thick comb-shape and Fresnel patterns with 10 mm linewidth have been made. Moreover. the complementary metallic microstructures have also been realized in the following electroforming procedure. The results showed that these two soluble polyimides were very suitable for KrF Laser LIGA process.

AB - In this study two organic soluble polyimides were successfully synthesized via polycondensation of a hexafluoropropyl group contained dianhydride with two kinds of diamines. These two polyimides (DMDB/6FDA, OT/6FDA) can be dissolved in most aprotic solvents (for example, NMP, DMAc) and many other common solvents (for example. THF, DMSO). The soluble polyimides also show good thermal stability and high absorption at the KrF excimer laser wavelength (λ = 248 nm). (The absorption coefficients of DMDB/6FDA and OT/6FDA were 1.26 × 105 cm-1 and 1.49 × 10-1, respectively.) The photoablation properties of the polyimides were studied in detail. Due to incorporating the hexafluoropropyl group into the chemical structure, these two polyimides have higher etching rates than Kapton (a conmercial PI film). The effects of exposure parameters on linewidth and taper-angle of polyimides with different chemical structure were also investigated here. Under the proper control of exposure conditions, good precision patterns with near-vertical side wall can be produced. The 300 mm thick comb-shape and Fresnel patterns with 10 mm linewidth have been made. Moreover. the complementary metallic microstructures have also been realized in the following electroforming procedure. The results showed that these two soluble polyimides were very suitable for KrF Laser LIGA process.

UR - http://www.scopus.com/inward/record.url?scp=0035806879&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035806879&partnerID=8YFLogxK

U2 - 10.1002/1521-3935(20010701)202:11<2394::AID-MACP2394>3.0.CO;2-K

DO - 10.1002/1521-3935(20010701)202:11<2394::AID-MACP2394>3.0.CO;2-K

M3 - Article

AN - SCOPUS:0035806879

VL - 202

SP - 2394

EP - 2401

JO - Macromolecular Chemistry and Physics

JF - Macromolecular Chemistry and Physics

SN - 1022-1352

IS - 11

ER -