Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien Li Chang*, Chien Yu Chen, Chien Ping Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

Original languageEnglish
Pages (from-to)381-385
Number of pages5
JournalMicroelectronic Engineering
Publication statusPublished - 2013


  • Micromachining
  • Photovoltaic
  • Renewable energy
  • Thin Film
  • Ultrafast laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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