Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien Li Chang; Chien Yu Chen; Chien Ping Wang

doi:10.1016/j.mee.2013.02.072

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien Li Chang^*, Chien Yu Chen, Chien Ping Wang

^*Corresponding author for this work

Department of Mechatronic Engineering

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

Original language	English
Pages (from-to)	381-385
Number of pages	5
Journal	Microelectronic Engineering
Volume	110
DOIs	https://doi.org/10.1016/j.mee.2013.02.072
Publication status	Published - 2013

Keywords

Micromachining
Photovoltaic
Renewable energy
Thin Film
Ultrafast laser

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.mee.2013.02.072

Cite this

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title = "Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules",

abstract = "This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.",

keywords = "Micromachining, Photovoltaic, Renewable energy, Thin Film, Ultrafast laser",

author = "Chang, {Tien Li} and Chen, {Chien Yu} and Wang, {Chien Ping}",

year = "2013",

doi = "10.1016/j.mee.2013.02.072",

language = "English",

volume = "110",

pages = "381--385",

journal = "Microelectronic Engineering",

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T1 - Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

AU - Chang, Tien Li

AU - Chen, Chien Yu

AU - Wang, Chien Ping

PY - 2013

Y1 - 2013

N2 - This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

AB - This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

KW - Micromachining

KW - Photovoltaic

KW - Renewable energy

KW - Thin Film

KW - Ultrafast laser

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DO - 10.1016/j.mee.2013.02.072

M3 - Article

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SN - 0167-9317

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EP - 385

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

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