Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien-Li Chang, Chien Yu Chen, Chien Ping Wang

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

This study presents the micromachining of CuInxGa(1-x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

Original languageEnglish
Pages (from-to)381-385
Number of pages5
JournalMicroelectronic Engineering
Volume110
DOIs
Publication statusPublished - 2013 Jan 1

Fingerprint

Ultrafast lasers
laser machining
Infrared lasers
Micromachining
Laser ablation
Ultrashort pulses
Machining
Mirrors
modules
Throughput
Thin films
Lasers
thin films
scoring
micromachining
machining
infrared lasers
scanners
laser ablation
lasers

Keywords

  • Micromachining
  • Photovoltaic
  • Renewable energy
  • Thin Film
  • Ultrafast laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules. / Chang, Tien-Li; Chen, Chien Yu; Wang, Chien Ping.

In: Microelectronic Engineering, Vol. 110, 01.01.2013, p. 381-385.

Research output: Contribution to journalArticle

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