Picosecond laser-direct fabrication of graphene-based electrodes for a gas sensor module with wireless circuits

Tien Li Chang, Cheng Ying Chou, Chien Ping Wang, Tun Chien Teng, Hsieh Cheng Han

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper proposes an ultrafast-laser process for ablating multilayer graphene film to form the conductive electrodes for a gas sensor module with wireless circuits. In this study, a picosecond laser source was directly used to perform double scanning for precisely fabricating the spiral electrode pattern as the sensing test region. The ablated surface of multilayer graphene structures fabricated using sufficiently strong pulses with a pulse width of 7 ps and a wavelength of 532 nm was investigated through scanning electron microscopy. The graphene-based electrode was integrated with wireless circuits to form a gas sensor module. The relationship between the spiral electrode design and sensitivity to gas detection was analyzed. Electrical detection of gas was studied by employing different electrode designs, and change in the detection limit at room temperature with change in resistance was examined. Furthermore, the role of graphene-based devices comprising spiral electrodes fabricated using the laser process and integrated with wireless circuits to form a module in gas detection was analyzed.

Original languageEnglish
Pages (from-to)19-26
Number of pages8
JournalMicroelectronic Engineering
Volume210
DOIs
Publication statusPublished - 2019 Apr 1

Fingerprint

Graphite
Chemical sensors
Graphene
graphene
modules
Fabrication
Electrodes
fabrication
electrodes
Networks (circuits)
Lasers
sensors
gases
lasers
Gases
Multilayers
Ultrafast lasers
pulse duration
Scanning
Wavelength

Keywords

  • Ablation
  • Gas sensor
  • Multilayer-graphene
  • Picosecond laser
  • Wireless circuits

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Picosecond laser-direct fabrication of graphene-based electrodes for a gas sensor module with wireless circuits. / Chang, Tien Li; Chou, Cheng Ying; Wang, Chien Ping; Teng, Tun Chien; Han, Hsieh Cheng.

In: Microelectronic Engineering, Vol. 210, 01.04.2019, p. 19-26.

Research output: Contribution to journalArticle

@article{130845b090f54a09a5918930e89a4f20,
title = "Picosecond laser-direct fabrication of graphene-based electrodes for a gas sensor module with wireless circuits",
abstract = "This paper proposes an ultrafast-laser process for ablating multilayer graphene film to form the conductive electrodes for a gas sensor module with wireless circuits. In this study, a picosecond laser source was directly used to perform double scanning for precisely fabricating the spiral electrode pattern as the sensing test region. The ablated surface of multilayer graphene structures fabricated using sufficiently strong pulses with a pulse width of 7 ps and a wavelength of 532 nm was investigated through scanning electron microscopy. The graphene-based electrode was integrated with wireless circuits to form a gas sensor module. The relationship between the spiral electrode design and sensitivity to gas detection was analyzed. Electrical detection of gas was studied by employing different electrode designs, and change in the detection limit at room temperature with change in resistance was examined. Furthermore, the role of graphene-based devices comprising spiral electrodes fabricated using the laser process and integrated with wireless circuits to form a module in gas detection was analyzed.",
keywords = "Ablation, Gas sensor, Multilayer-graphene, Picosecond laser, Wireless circuits",
author = "Chang, {Tien Li} and Chou, {Cheng Ying} and Wang, {Chien Ping} and Teng, {Tun Chien} and Han, {Hsieh Cheng}",
year = "2019",
month = "4",
day = "1",
doi = "10.1016/j.mee.2019.03.003",
language = "English",
volume = "210",
pages = "19--26",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",

}

TY - JOUR

T1 - Picosecond laser-direct fabrication of graphene-based electrodes for a gas sensor module with wireless circuits

AU - Chang, Tien Li

AU - Chou, Cheng Ying

AU - Wang, Chien Ping

AU - Teng, Tun Chien

AU - Han, Hsieh Cheng

PY - 2019/4/1

Y1 - 2019/4/1

N2 - This paper proposes an ultrafast-laser process for ablating multilayer graphene film to form the conductive electrodes for a gas sensor module with wireless circuits. In this study, a picosecond laser source was directly used to perform double scanning for precisely fabricating the spiral electrode pattern as the sensing test region. The ablated surface of multilayer graphene structures fabricated using sufficiently strong pulses with a pulse width of 7 ps and a wavelength of 532 nm was investigated through scanning electron microscopy. The graphene-based electrode was integrated with wireless circuits to form a gas sensor module. The relationship between the spiral electrode design and sensitivity to gas detection was analyzed. Electrical detection of gas was studied by employing different electrode designs, and change in the detection limit at room temperature with change in resistance was examined. Furthermore, the role of graphene-based devices comprising spiral electrodes fabricated using the laser process and integrated with wireless circuits to form a module in gas detection was analyzed.

AB - This paper proposes an ultrafast-laser process for ablating multilayer graphene film to form the conductive electrodes for a gas sensor module with wireless circuits. In this study, a picosecond laser source was directly used to perform double scanning for precisely fabricating the spiral electrode pattern as the sensing test region. The ablated surface of multilayer graphene structures fabricated using sufficiently strong pulses with a pulse width of 7 ps and a wavelength of 532 nm was investigated through scanning electron microscopy. The graphene-based electrode was integrated with wireless circuits to form a gas sensor module. The relationship between the spiral electrode design and sensitivity to gas detection was analyzed. Electrical detection of gas was studied by employing different electrode designs, and change in the detection limit at room temperature with change in resistance was examined. Furthermore, the role of graphene-based devices comprising spiral electrodes fabricated using the laser process and integrated with wireless circuits to form a module in gas detection was analyzed.

KW - Ablation

KW - Gas sensor

KW - Multilayer-graphene

KW - Picosecond laser

KW - Wireless circuits

UR - http://www.scopus.com/inward/record.url?scp=85063342829&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85063342829&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2019.03.003

DO - 10.1016/j.mee.2019.03.003

M3 - Article

AN - SCOPUS:85063342829

VL - 210

SP - 19

EP - 26

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -