Physical properties of polycrystalline Cr-doped SnO                         2                          films grown on glasses using reactive dc magnetron co-sputtering technique

Shiu Jen Liu; Liang Yu Chen; Chai Yun Liu; Hau Wei Fang; Jang Hsing Hsieh; Jenh Yih Juang

doi:10.1016/j.apsusc.2010.09.083

Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique

Shiu Jen Liu^*, Liang Yu Chen, Chai Yun Liu, Hau Wei Fang, Jang Hsing Hsieh, Jenh Yih Juang

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO ₂ films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO ₂ films exhibit paramagnetic characteristics from room temperature down to 25 K.

Original language	English
Pages (from-to)	2254-2258
Number of pages	5
Journal	Applied Surface Science
Volume	257
Issue number	6
DOIs	https://doi.org/10.1016/j.apsusc.2010.09.083
Publication status	Published - 2011 Jan 1

Keywords

Co-sputtering technique
Optoelectronic properties
Paramagnetism

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/j.apsusc.2010.09.083

Cite this

Liu, S. J., Chen, L. Y., Liu, C. Y., Fang, H. W., Hsieh, J. H., & Juang, J. Y. (2011). Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique Applied Surface Science, 257(6), 2254-2258. https://doi.org/10.1016/j.apsusc.2010.09.083

Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique . / Liu, Shiu Jen; Chen, Liang Yu; Liu, Chai Yun et al.
In: Applied Surface Science, Vol. 257, No. 6, 01.01.2011, p. 2254-2258.

Research output: Contribution to journal › Article › peer-review

Liu, SJ, Chen, LY, Liu, CY, Fang, HW, Hsieh, JH & Juang, JY 2011, ' Physical properties of polycrystalline Cr-doped SnO ₂ films grown on glasses using reactive dc magnetron co-sputtering technique ', Applied Surface Science, vol. 257, no. 6, pp. 2254-2258. https://doi.org/10.1016/j.apsusc.2010.09.083

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title = " Physical properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique ",

abstract = " Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO 2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO 2 films exhibit paramagnetic characteristics from room temperature down to 25 K.",

keywords = "Co-sputtering technique, Optoelectronic properties, Paramagnetism",

author = "Liu, {Shiu Jen} and Chen, {Liang Yu} and Liu, {Chai Yun} and Fang, {Hau Wei} and Hsieh, {Jang Hsing} and Juang, {Jenh Yih}",

note = "Funding Information: This work was supported by the National Science Council of Taiwan , R.O.C. under Grant No. NSC 98-2112-M-003-005-MY3 .",

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AU - Hsieh, Jang Hsing

AU - Juang, Jenh Yih

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N2 - Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO 2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO 2 films exhibit paramagnetic characteristics from room temperature down to 25 K.

AB - Abstract: Electrical, optical and magnetic properties of polycrystalline Cr-doped SnO 2 films grown on glasses using reactive dc magnetron co-sputtering technique were investigated. The Cr content was modulated by varying the sputtering power applied on the Cr target. The carrier concentration and conductivity of doped films are reduced with increasing the Cr doping. Moreover, while the Cr content ratio Cr/(Sn + Cr) exceeds 0.9 at.%, the doped SnO 2 films become insulators and the optical transmission is strongly affected. The surface roughness of sputtered films is also increased by Cr doping. The co-sputtered Cr-doped SnO 2 films exhibit paramagnetic characteristics from room temperature down to 25 K.

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