Physical and electrical properties of Ti-doped Er2 O3 films for high-k gate dielectrics

Chuan Hsi Liu*, Tung Ming Pan, Wei Hao Shu, Kuo Chan Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Physical and electrical properties of Ti-doped Er2 O3 films for high-k gate dielectrics'. Together they form a unique fingerprint.

Material Science

INIS