Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

Chun Chuan Yeh; Yine Huang Lai; Wen Yi Chu; Chuin Tih Yeh; Wei Hsiu Hung

doi:10.1016/j.susc.2004.06.207

Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

Chun Chuan Yeh, Yine Huang Lai, Wen Yi Chu, Chuin Tih Yeh, Wei Hsiu Hung^*

^*Corresponding author for this work

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)₆. Mo(CO)₆ adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)₆ undergoes decarbonylation to form surface Mo(CO)_x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)_x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.

Original language	English
Pages (from-to)	81-88
Number of pages	8
Journal	Surface Science
Volume	565
Issue number	1
DOIs	https://doi.org/10.1016/j.susc.2004.06.207
Publication status	Published - 2004 Sept 1

Keywords

Chemical vapor deposition
Molybdenum
Platinum
Thermal desorption
X-ray photoelectron spectroscopy

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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title = "Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)",

abstract = "Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)6. Mo(CO)6 adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)6 undergoes decarbonylation to form surface Mo(CO)x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.",

keywords = "Chemical vapor deposition, Molybdenum, Platinum, Thermal desorption, X-ray photoelectron spectroscopy",

author = "Yeh, {Chun Chuan} and Lai, {Yine Huang} and Chu, {Wen Yi} and Yeh, {Chuin Tih} and Hung, {Wei Hsiu}",

note = "Funding Information: For support we thank NSRRC and National Science Council under Grant No. NSC92-2113-M-003-025.",

year = "2004",

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doi = "10.1016/j.susc.2004.06.207",

language = "English",

volume = "565",

pages = "81--88",

journal = "Surface Science",

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TY - JOUR

T1 - Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

AU - Yeh, Chun Chuan

AU - Lai, Yine Huang

AU - Chu, Wen Yi

AU - Yeh, Chuin Tih

AU - Hung, Wei Hsiu

N1 - Funding Information: For support we thank NSRRC and National Science Council under Grant No. NSC92-2113-M-003-025.

PY - 2004/9/1

Y1 - 2004/9/1

N2 - Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)6. Mo(CO)6 adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)6 undergoes decarbonylation to form surface Mo(CO)x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.

AB - Temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS) have been employed to study the adsorption and photon-induced decomposition of Mo(CO)6. Mo(CO)6 adsorbs molecularly on a Pt(111) surface with weak interaction at 100 K and desorbs intact at 210 K without undergoing thermal decomposition. Adsorbed Mo(CO)6 undergoes decarbonylation to form surface Mo(CO)x (x ≤ 5) under irradiation of ultraviolet light. The Mo(CO)x species can release further CO ligands to form Mo adatoms with CO desorption at 285 K. In addition, a fraction of the released CO ligands transfers onto the Pt surface and subsequently desorbs at 350-550 K. The resulting Mo layer deposited on the Pt surface is nearly free of contamination by C and O. The deposited Mo adatoms can diffuse into the bulk Pt at temperatures above 1070 K.

KW - Chemical vapor deposition

KW - Molybdenum

KW - Platinum

KW - Thermal desorption

KW - X-ray photoelectron spectroscopy

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JO - Surface Science

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Photon-induced chemical vapor deposition of molybdenum on Pt(1 1 1)

Abstract

Keywords

ASJC Scopus subject areas

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