Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure

Guan Lin Liou; Chun Hu Cheng; Yu Chien Chiu

doi:10.1109/EDSSC.2017.8126507

Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure

Guan Lin Liou, Chun Hu Cheng^*, Yu Chien Chiu

^*Corresponding author for this work

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this work, we investigated the photocapacitive effect of the metal-ferroelectric-insulator-semiconductor capacitors under illumination. The photocapacitive effect is mainly caused by light photon excitation, contributed from the variation of depletion charge. We suggested that the ferroelectric domains are affected by defect dipole charges formed by the interface trapped charges to lead to the variation of depletion capacitance.

Original language	English
Title of host publication	EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-2
Number of pages	2
ISBN (Electronic)	9781538629079
DOIs	https://doi.org/10.1109/EDSSC.2017.8126507
Publication status	Published - 2017 Dec 1
Event	13th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2017 - Hsinchu, Taiwan Duration: 2017 Oct 18 → 2017 Oct 20

Publication series

Name	EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits
Volume	2017-January

Conference

Conference	13th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2017
Country/Territory	Taiwan
City	Hsinchu
Period	2017/10/18 → 2017/10/20

Keywords

Ferroelectric
Hafnium-zirconate
Photocapacitive effect

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/EDSSC.2017.8126507

Cite this

Liou, G. L., Cheng, C. H., & Chiu, Y. C. (2017). Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure. In EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits (pp. 1-2). (EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits; Vol. 2017-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDSSC.2017.8126507

Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure. / Liou, Guan Lin; Cheng, Chun Hu; Chiu, Yu Chien.
EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-2 (EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits; Vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Liou, GL, Cheng, CH & Chiu, YC 2017, Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure. in EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits. EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits, vol. 2017-January, Institute of Electrical and Electronics Engineers Inc., pp. 1-2, 13th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2017, Hsinchu, Taiwan, 2017/10/18. https://doi.org/10.1109/EDSSC.2017.8126507

Liou GL, Cheng CH, Chiu YC. Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure. In EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-2. (EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits). doi: 10.1109/EDSSC.2017.8126507

Liou, Guan Lin ; Cheng, Chun Hu ; Chiu, Yu Chien. / Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure. EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1-2 (EDSSC 2017 - 13th IEEE International Conference on Electron Devices and Solid-State Circuits).

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Photocapacitive effect of ferroelectric hafnium-zirconate capacitor structure

Abstract

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Keywords

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