Patterning of multilayer graphene on glass substrate by using ultraviolet picosecond laser pulses

Tien Li Chang, Zhao Chi Chen, Wen Yi Chen, Hsieh Cheng Han, Shih Feng Tseng

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper presents an approach that involves directly patterning multilayer graphene on a glass substrate by using ultraviolet picosecond (PS) laser irradiation. The PS laser is ultrafast, with a pulse duration of 15 ps, and can be operated at a wavelength of 355 nm. In this study, the multiple pulse ablation threshold fluence for patterning multilayer graphene was 5.2 J/cm2, with a pulse repetition rate of 200 kHz and at a fixed scanning speed of 250 mm/s. The effect of laser parameters on the width, depth, and quality of patterning was explored. To investigate laser-nonablated and laser-ablated multilayer graphene, the characteristics of graphene thin film were measured using Raman, transmittance, and electrical analyses. The experimental results revealed that the PS laser is a promising and competitive tool for ablating multiple layers to several layers of graphene thin films and even for completely removing graphene thin-film layers. The PS laser technique can be useful in developing graphene-based devices. Moreover, this approach has the potential for industrial applications.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalMicroelectronic Engineering
Volume158
DOIs
Publication statusPublished - 2016 Jun 1

Fingerprint

Ultraviolet lasers
Graphite
Graphene
Laser pulses
graphene
Multilayers
Glass
glass
Substrates
pulses
lasers
Lasers
Thin films
thin films
Ultrafast lasers
Pulse repetition rate
pulse repetition rate
Laser beam effects
Ablation
ablation

Keywords

  • Laser ablation
  • Multilayer graphene
  • Patterning graphene
  • Picosecond laser
  • Thin films
  • Ultrafast laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Patterning of multilayer graphene on glass substrate by using ultraviolet picosecond laser pulses. / Chang, Tien Li; Chen, Zhao Chi; Chen, Wen Yi; Han, Hsieh Cheng; Tseng, Shih Feng.

In: Microelectronic Engineering, Vol. 158, 01.06.2016, p. 1-5.

Research output: Contribution to journalArticle

Chang, Tien Li ; Chen, Zhao Chi ; Chen, Wen Yi ; Han, Hsieh Cheng ; Tseng, Shih Feng. / Patterning of multilayer graphene on glass substrate by using ultraviolet picosecond laser pulses. In: Microelectronic Engineering. 2016 ; Vol. 158. pp. 1-5.
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