In this study, we demonstrated experimentally and theoretically that oxygen vacancies are responsible for the charge transport in HfO2. Basing on the model of phonon-assisted tunneling between traps, and assuming that the electron traps are oxygen vacancies, good quantitative agreement between the experimental and theoretical data of current-voltage characteristics was achieved. The thermal trap energy of 1.25eV in HfO2 was determined based on the charge transport experiments.
|Journal||Applied Physics Letters|
|Publication status||Published - 2014 Dec 1|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)