Abstract
In this study, we demonstrated experimentally and theoretically that oxygen vacancies are responsible for the charge transport in HfO2. Basing on the model of phonon-assisted tunneling between traps, and assuming that the electron traps are oxygen vacancies, good quantitative agreement between the experimental and theoretical data of current-voltage characteristics was achieved. The thermal trap energy of 1.25eV in HfO2 was determined based on the charge transport experiments.
Original language | English |
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Article number | 222901 |
Journal | Applied Physics Letters |
Volume | 105 |
Issue number | 22 |
DOIs | |
Publication status | Published - 2014 Dec 1 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)