Ordered Mesoporous Zeolite Thin Films with Perpendicular Reticular Nanochannels of Wafer Size Area

Hsueh Jen Chang, Tzu Ying Chen, Zi Ping Zhao, Zih Jyun Dai, Yu Lin Chen, Chung Yuan Mou*, Yi Hsin Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


Highly ordered mesoporous zeolite thin films (MZTFs) are grown at rigid substrates via molecular interaction from ternary structure-directing agents (SDAs) in a Stöber-like condition. The ultrathin films (10-20 nm) were deposited layer-by-layer via self-assembly of β-zeolite seeds and SDAs at 40-50 °C, resulting reticular cellular pores and perpendicular nanochannels with average pore sizes (6.7 ± 1.1 nm). The walls of the nanochannels consist of zeolitic structures in microcrystallines. Compared to cylindrical mesochannels of amorphous silica thin films, the MZTFs with reticular mesochannels demonstrate 5R/6R stretching modes (550-650 cm-1) and significantly enhanced hydrothermal stability. The MZTFs were characterized in top-view and cross-sectional electron microscopies (SEM/HRSEM/HRTEM) as well as X-ray scattering techniques (GIXRD/GISAXS), which confirm a body-centered tetragonal (Im3m) unit cell with unique Moiré patterns. Upon calcination, the film thickness is reduced to 10.6 nm with a structure transformation to a hexagonal phase. The hydrothermally stable MZTFs can serve as excellent hard templates for growing dense nanoparticle arrays and confining their diameters to well-defined sizes (4.8 ± 1.3 nm).

Original languageEnglish
Pages (from-to)8303-8313
Number of pages11
JournalChemistry of Materials
Issue number22
Publication statusPublished - 2018 Nov 27

ASJC Scopus subject areas

  • General Chemistry
  • General Chemical Engineering
  • Materials Chemistry


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