Optimum sputtering conditions on the in-situ growth of superconducting YBa2Cu3Oy films with an off-axis RF sputtering configuration

L. M. Wang; H. W. Yu; H. C. Yang; H. E. Horng

doi:10.1016/0921-4534(95)00618-4

Optimum sputtering conditions on the in-situ growth of superconducting YBa₂Cu₃O_y films with an off-axis RF sputtering configuration

L. M. Wang^*, H. W. Yu, H. C. Yang, H. E. Horng

^*Corresponding author for this work

Undergraduate Program of Electro-Optical Engineering

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

The effects of sputtering conditions on the transport properties of YBa₂Cu₃O_y (YBCO) thin films were investigated in this work using an off-axis RF sputtering configuration. These conditions included the substrate temperature, the distance from the substrate to the target, the total pressure of the sputtering gas and the gas composition. The substrates were MgO (001) and SrTiO₃ (001) and the sputtering gas was a mixture of Ar and O₂. The YBCO films were characterized by resistivity measurements, X-ray diffraction and scanning force microscopy (SFM). Additionally, the optimum conditions of growing high-quality YBCO films were obtained. Those conditions were found to be: (1) the substrate is 3.5 cm horizontal and 3.0 cm vertical away from center of target, (2) the substrate temperature is 680°C for MgO and it is 720°C for SrTiO₃, and (3) the pressure of the sputtering gas of Ar: O₂ is (3 : 7) at 300 mTorr. The high-quality YBCO films revealed a transition temperature T_c(R = 0) at 87 ∼ 90 K, a normal-state resistance ratio R_300K/R_100K ∼ 3 and a normal-state resistivity at 300 K smaller than 200 μΩ cm.

Original language	English
Pages (from-to)	57-63
Number of pages	7
Journal	Physica C: Superconductivity and its applications
Volume	256
Issue number	1-2
DOIs	https://doi.org/10.1016/0921-4534(95)00618-4
Publication status	Published - 1996 Jan 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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title = "Optimum sputtering conditions on the in-situ growth of superconducting YBa2Cu3Oy films with an off-axis RF sputtering configuration",

abstract = "The effects of sputtering conditions on the transport properties of YBa2Cu3Oy (YBCO) thin films were investigated in this work using an off-axis RF sputtering configuration. These conditions included the substrate temperature, the distance from the substrate to the target, the total pressure of the sputtering gas and the gas composition. The substrates were MgO (001) and SrTiO3 (001) and the sputtering gas was a mixture of Ar and O2. The YBCO films were characterized by resistivity measurements, X-ray diffraction and scanning force microscopy (SFM). Additionally, the optimum conditions of growing high-quality YBCO films were obtained. Those conditions were found to be: (1) the substrate is 3.5 cm horizontal and 3.0 cm vertical away from center of target, (2) the substrate temperature is 680°C for MgO and it is 720°C for SrTiO3, and (3) the pressure of the sputtering gas of Ar: O2 is (3 : 7) at 300 mTorr. The high-quality YBCO films revealed a transition temperature Tc(R = 0) at 87 ∼ 90 K, a normal-state resistance ratio R300K/R100K ∼ 3 and a normal-state resistivity at 300 K smaller than 200 μΩ cm.",

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AB - The effects of sputtering conditions on the transport properties of YBa2Cu3Oy (YBCO) thin films were investigated in this work using an off-axis RF sputtering configuration. These conditions included the substrate temperature, the distance from the substrate to the target, the total pressure of the sputtering gas and the gas composition. The substrates were MgO (001) and SrTiO3 (001) and the sputtering gas was a mixture of Ar and O2. The YBCO films were characterized by resistivity measurements, X-ray diffraction and scanning force microscopy (SFM). Additionally, the optimum conditions of growing high-quality YBCO films were obtained. Those conditions were found to be: (1) the substrate is 3.5 cm horizontal and 3.0 cm vertical away from center of target, (2) the substrate temperature is 680°C for MgO and it is 720°C for SrTiO3, and (3) the pressure of the sputtering gas of Ar: O2 is (3 : 7) at 300 mTorr. The high-quality YBCO films revealed a transition temperature Tc(R = 0) at 87 ∼ 90 K, a normal-state resistance ratio R300K/R100K ∼ 3 and a normal-state resistivity at 300 K smaller than 200 μΩ cm.

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Optimum sputtering conditions on the in-situ growth of superconducting YBa₂Cu₃O_y films with an off-axis RF sputtering configuration

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