Optimum sputtering conditions on the in-situ growth of superconducting YBa2Cu3Oy films with an off-axis RF sputtering configuration

L. M. Wang, H. W. Yu, Hong-Chang Yang, Herng-Er Horng

    Research output: Contribution to journalArticle

    25 Citations (Scopus)

    Abstract

    The effects of sputtering conditions on the transport properties of YBa2Cu3Oy (YBCO) thin films were investigated in this work using an off-axis RF sputtering configuration. These conditions included the substrate temperature, the distance from the substrate to the target, the total pressure of the sputtering gas and the gas composition. The substrates were MgO (001) and SrTiO3 (001) and the sputtering gas was a mixture of Ar and O2. The YBCO films were characterized by resistivity measurements, X-ray diffraction and scanning force microscopy (SFM). Additionally, the optimum conditions of growing high-quality YBCO films were obtained. Those conditions were found to be: (1) the substrate is 3.5 cm horizontal and 3.0 cm vertical away from center of target, (2) the substrate temperature is 680°C for MgO and it is 720°C for SrTiO3, and (3) the pressure of the sputtering gas of Ar: O2 is (3 : 7) at 300 mTorr. The high-quality YBCO films revealed a transition temperature Tc(R = 0) at 87 ∼ 90 K, a normal-state resistance ratio R300K/R100K ∼ 3 and a normal-state resistivity at 300 K smaller than 200 μΩ cm.

    Original languageEnglish
    Pages (from-to)57-63
    Number of pages7
    JournalPhysica C: Superconductivity and its Applications
    Volume256
    Issue number1-2
    DOIs
    Publication statusPublished - 1996 Jan 1

    Fingerprint

    Superconducting films
    superconducting films
    Sputtering
    sputtering
    Gases
    Substrates
    configurations
    gases
    electrical resistivity
    gas composition
    Transport properties
    Superconducting transition temperature
    Atomic force microscopy
    transport properties
    transition temperature
    microscopy
    X ray diffraction
    Thin films
    Temperature
    scanning

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Energy Engineering and Power Technology
    • Electrical and Electronic Engineering

    Cite this

    Optimum sputtering conditions on the in-situ growth of superconducting YBa2Cu3Oy films with an off-axis RF sputtering configuration. / Wang, L. M.; Yu, H. W.; Yang, Hong-Chang; Horng, Herng-Er.

    In: Physica C: Superconductivity and its Applications, Vol. 256, No. 1-2, 01.01.1996, p. 57-63.

    Research output: Contribution to journalArticle

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