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Optimization of gallium-doped ZnO thin films grown using Grey-Taguchi technique
J. Y. Kao
, C. C. Tsao
,
M. Jou
, W. S. Li
, C. Y. Hsu
*
*
Corresponding author for this work
Department of Industrial Education
Research output
:
Contribution to journal
›
Article
›
peer-review
5
Citations (Scopus)
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INIS
optimization
100%
gallium
100%
doped materials
100%
thin films
100%
zinc oxides
100%
radiowave radiation
100%
design
75%
prediction
75%
power
75%
electrical resistivity
50%
levels
25%
performance
25%
range
25%
films
25%
deposition
25%
substrates
25%
sputtering
25%
magnetrons
25%
Engineering
Taguchi Technique
100%
Process Pressure
75%
Parameter Set
25%
Chemical Engineering
Film
100%
Magnetron Sputtering
33%
Zinc Oxide
33%
Material Science
Conductive Film
50%