Novel forming for fabrication of micro V-cut grooves using the optical-element

Ying Jui Huang; Tien Li Chang; Hwai Pwu Chou; Fuh Yu Chang; Cheng Hsuan Lin

doi:10.1109/IMNC.2007.4456267

Novel forming for fabrication of micro V-cut grooves using the optical-element

Ying Jui Huang^*
, Tien Li Chang
, Hwai Pwu Chou
, Fuh Yu Chang
, Cheng Hsuan Lin

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Fig. 3 shows the micro V-cut array by photolithography. In this experimental stage, 30 × 1 V-cut arrays can be successfully fabricated. The thickness and angle of the V-cut can be controlled with spinning speed and prism's angle. The measured results indicate that the patterning microstructures of their inclines and V-cut angles are very smooth and uniform, respectively.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	388-389
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456267
Publication status	Published - 2007
Externally published	Yes
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Other	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	2007/11/05 → 2007/11/08

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2007.4456267

Cite this

Huang, Y. J., Chang, T. L., Chou, H. P., Chang, F. Y., & Lin, C. H. (2007). Novel forming for fabrication of micro V-cut grooves using the optical-element. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 388-389). Article 4456267 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456267

Novel forming for fabrication of micro V-cut grooves using the optical-element. / Huang, Ying Jui; Chang, Tien Li; Chou, Hwai Pwu et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 388-389 4456267 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Huang, YJ, Chang, TL, Chou, HP, Chang, FY & Lin, CH 2007, Novel forming for fabrication of micro V-cut grooves using the optical-element. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456267, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 388-389, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 2007/11/05. https://doi.org/10.1109/IMNC.2007.4456267

Huang YJ, Chang TL, Chou HP, Chang FY, Lin CH. Novel forming for fabrication of micro V-cut grooves using the optical-element. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 388-389. 4456267. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456267

Huang, Ying Jui ; Chang, Tien Li ; Chou, Hwai Pwu et al. / Novel forming for fabrication of micro V-cut grooves using the optical-element. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 388-389 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

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abstract = "Fig. 3 shows the micro V-cut array by photolithography. In this experimental stage, 30 × 1 V-cut arrays can be successfully fabricated. The thickness and angle of the V-cut can be controlled with spinning speed and prism's angle. The measured results indicate that the patterning microstructures of their inclines and V-cut angles are very smooth and uniform, respectively.",

author = "Huang, \{Ying Jui\} and Chang, \{Tien Li\} and Chou, \{Hwai Pwu\} and Chang, \{Fuh Yu\} and Lin, \{Cheng Hsuan\}",

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note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

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N2 - Fig. 3 shows the micro V-cut array by photolithography. In this experimental stage, 30 × 1 V-cut arrays can be successfully fabricated. The thickness and angle of the V-cut can be controlled with spinning speed and prism's angle. The measured results indicate that the patterning microstructures of their inclines and V-cut angles are very smooth and uniform, respectively.

AB - Fig. 3 shows the micro V-cut array by photolithography. In this experimental stage, 30 × 1 V-cut arrays can be successfully fabricated. The thickness and angle of the V-cut can be controlled with spinning speed and prism's angle. The measured results indicate that the patterning microstructures of their inclines and V-cut angles are very smooth and uniform, respectively.

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T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

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ER -

Novel forming for fabrication of micro V-cut grooves using the optical-element

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