Novel forming for fabrication of micro V-cut grooves using the optical-element

Ying Jui Huang, Tien Li Chang, Hwai Pwu Chou, Fuh Yu Chang, Cheng Hsuan Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fig. 3 shows the micro V-cut array by photolithography. In this experimental stage, 30 × 1 V-cut arrays can be successfully fabricated. The thickness and angle of the V-cut can be controlled with spinning speed and prism's angle. The measured results indicate that the patterning microstructures of their inclines and V-cut angles are very smooth and uniform, respectively.

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages388-389
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
CountryJapan
CityKyoto
Period07/11/507/11/8

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ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Huang, Y. J., Chang, T. L., Chou, H. P., Chang, F. Y., & Lin, C. H. (2007). Novel forming for fabrication of micro V-cut grooves using the optical-element. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 388-389). [4456267] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456267