Non-contact bias voltage measurement using the electro-optic probing technique

Wen Kai Kuo, Jen Yu Kuo, Chien Jang Wu, Fuh Shyang Juang

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    The traditional non-contact electro-optic (EO) probing technique is further extended to measure quasi-dc bias voltages. We propose a special external LiTaO3 probe equipped with a grounded side-electrode (GSE) and a power supply modulation (PSM) method. The GSE can improve the voltage measurement sensitivity and error due to the tip position variation. The PSM can make all bias voltages chopped and readily picked up by using a high sensitivity lock-in amplifier. Test results on model circuits demonstrated that the proposed new EO probing system can obtain voltage measurement results that are in good agreement with known values. With this extension function this new system can perform ac high frequency and dc bias voltage measurements as well.

    Original languageEnglish
    Article number085706
    JournalMeasurement Science and Technology
    Volume19
    Issue number8
    DOIs
    Publication statusPublished - 2008 Aug 1

    Keywords

    • Electro-optic probing
    • Non-contact measurement

    ASJC Scopus subject areas

    • Instrumentation
    • Engineering (miscellaneous)
    • Applied Mathematics

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