Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature

Po Yi Chang; Po Yi Chang; Po Yi Chang; Ching Fu Lin; Ching Fu Lin; Ching Fu Lin; Samer El Khoury Rouphael; Samer El Khoury Rouphael; Ting Hsuan Huang; Chang Mao Wu; Dominique Berling; Dominique Berling; Ping Hung Yeh; Chia Jung Lu; Hsin Fei Meng; Hsiao Wen Zan; Olivier Soppera; Olivier Soppera

doi:10.1021/acsami.0c03257

Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H₂S Sensor at Room Temperature

Po Yi Chang, Po Yi Chang, Po Yi Chang, Ching Fu Lin, Ching Fu Lin, Ching Fu Lin, Samer El Khoury Rouphael, Samer El Khoury Rouphael, Ting Hsuan Huang, Chang Mao Wu, Dominique Berling, Dominique Berling, Ping Hung Yeh, Chia Jung Lu, Hsin Fei Meng, Hsiao Wen Zan^*, Olivier Soppera^*, Olivier Soppera^*

^*Corresponding author for this work

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.

Original language	English
Pages (from-to)	24984-24991
Number of pages	8
Journal	ACS Applied Materials and Interfaces
Volume	12
Issue number	22
DOIs	https://doi.org/10.1021/acsami.0c03257
Publication status	Published - 2020 Jun 3

Keywords

IZO
NIR
flexible
gas sensor
laser annealing
sol-gel

ASJC Scopus subject areas

Materials Science(all)

Access to Document

10.1021/acsami.0c03257

Cite this

Chang, P. Y., Chang, P. Y., Chang, P. Y., Lin, C. F., Lin, C. F., Lin, C. F., El Khoury Rouphael, S., El Khoury Rouphael, S., Huang, T. H., Wu, C. M., Berling, D., Berling, D., Yeh, P. H., Lu, C. J., Meng, H. F., Zan, H. W., Soppera, O., & Soppera, O. (2020). Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H₂S Sensor at Room Temperature. ACS Applied Materials and Interfaces, 12(22), 24984-24991. https://doi.org/10.1021/acsami.0c03257

Chang, PY, Chang, PY, Chang, PY, Lin, CF, Lin, CF, Lin, CF, El Khoury Rouphael, S, El Khoury Rouphael, S, Huang, TH, Wu, CM, Berling, D, Berling, D, Yeh, PH, Lu, CJ, Meng, HF, Zan, HW, Soppera, O & Soppera, O 2020, 'Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H₂S Sensor at Room Temperature', ACS Applied Materials and Interfaces, vol. 12, no. 22, pp. 24984-24991. https://doi.org/10.1021/acsami.0c03257

@article{1268621a446c470c95b4f1feda440bed,

title = "Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature",

abstract = "A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.",

keywords = "IZO, NIR, flexible, gas sensor, laser annealing, sol-gel",

author = "Chang, {Po Yi} and Chang, {Po Yi} and Chang, {Po Yi} and Lin, {Ching Fu} and Lin, {Ching Fu} and Lin, {Ching Fu} and {El Khoury Rouphael}, Samer and {El Khoury Rouphael}, Samer and Huang, {Ting Hsuan} and Wu, {Chang Mao} and Dominique Berling and Dominique Berling and Yeh, {Ping Hung} and Lu, {Chia Jung} and Meng, {Hsin Fei} and Zan, {Hsiao Wen} and Olivier Soppera and Olivier Soppera",

note = "Funding Information: The authors like to thank Philippe Fioux, Benjamin Leuschel, and Simon Gree for their assistance to run XPS and AFM experiments. This work was supported by funding from Agence Nationale pour la Recherche (Project PHOTOMOC, ANR-14-CE26546 0039 and Project NIRTRONIC, ANR-18-CE24-0028), Institut Carnot MICA (project SENSORTEX), and Ministry of Science and Technology, Taiwan (Projects 108-2923-E-009549 002-MY3 and 108-2221-E-009-114-) and the Higher Education Sprout Project of the National Chiao Tung University and Ministry of Education (MOE), Taiwan. Publisher Copyright: {\textcopyright} 2020 American Chemical Society.",

year = "2020",

month = jun,

day = "3",

doi = "10.1021/acsami.0c03257",

language = "English",

volume = "12",

pages = "24984--24991",

journal = "ACS Applied Materials and Interfaces",

issn = "1944-8244",

publisher = "American Chemical Society",

number = "22",

}

TY - JOUR

T1 - Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature

AU - Chang, Po Yi

AU - Lin, Ching Fu

AU - El Khoury Rouphael, Samer

AU - Huang, Ting Hsuan

AU - Wu, Chang Mao

AU - Berling, Dominique

AU - Yeh, Ping Hung

AU - Lu, Chia Jung

AU - Meng, Hsin Fei

AU - Zan, Hsiao Wen

AU - Soppera, Olivier

N1 - Funding Information: The authors like to thank Philippe Fioux, Benjamin Leuschel, and Simon Gree for their assistance to run XPS and AFM experiments. This work was supported by funding from Agence Nationale pour la Recherche (Project PHOTOMOC, ANR-14-CE26546 0039 and Project NIRTRONIC, ANR-18-CE24-0028), Institut Carnot MICA (project SENSORTEX), and Ministry of Science and Technology, Taiwan (Projects 108-2923-E-009549 002-MY3 and 108-2221-E-009-114-) and the Higher Education Sprout Project of the National Chiao Tung University and Ministry of Education (MOE), Taiwan. Publisher Copyright: © 2020 American Chemical Society.

PY - 2020/6/3

Y1 - 2020/6/3

N2 - A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.

AB - A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.

KW - IZO

KW - NIR

KW - flexible

KW - gas sensor

KW - laser annealing

KW - sol-gel

UR - http://www.scopus.com/inward/record.url?scp=85086051306&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85086051306&partnerID=8YFLogxK

U2 - 10.1021/acsami.0c03257

DO - 10.1021/acsami.0c03257

M3 - Article

C2 - 32367710

AN - SCOPUS:85086051306

SN - 1944-8244

VL - 12

SP - 24984

EP - 24991

JO - ACS Applied Materials and Interfaces

JF - ACS Applied Materials and Interfaces

IS - 22

ER -