Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H2S Sensor at Room Temperature

Po Yi Chang, Po Yi Chang, Po Yi Chang, Ching Fu Lin, Ching Fu Lin, Ching Fu Lin, Samer El Khoury Rouphael, Samer El Khoury Rouphael, Ting Hsuan Huang, Chang Mao Wu, Dominique Berling, Dominique Berling, Ping Hung Yeh, Chia Jung Lu, Hsin Fei Meng, Hsiao Wen Zan, Olivier Soppera, Olivier Soppera

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.

Original languageEnglish
Pages (from-to)24984-24991
Number of pages8
JournalACS Applied Materials and Interfaces
Volume12
Issue number22
DOIs
Publication statusPublished - 2020 Jun 3

Keywords

  • IZO
  • NIR
  • flexible
  • gas sensor
  • laser annealing
  • sol-gel

ASJC Scopus subject areas

  • Materials Science(all)

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